Masaru Izawa

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 11:00 AM - 11:30 AM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.7 Plasma Electronics Invited Talk

[18a-C204-8~8] 8.7 Plasma Electronics Invited Talk

11:00 AM - 11:30 AM

[18a-C204-8] [INVITED] Plasma etching technology of ULSI devices in IoT

〇Masaru Izawa¹, Kazunori Shinoda², Nobuya Miyoshi², Hiroyuki Kobayashi², Kenji Ishikawa³, Masaru Hori³ (1.Hitachi High-Tech, 2.Hitachi R&D, 3.Nagoya Univ.)

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