Kota Ushimaru

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:00 PM - 3:45 PM B301 (53-301)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-B301-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:30 PM - 1:45 PM

[18p-B301-3] Evaluation of charge-up on surface of SiO₂ deposited by plasma CVD with XPS to investigate self-compensation mechanism of charge-up on dielectric surfaces

〇(B)Kota Ushimaru^1,2, Takahiro Harie^1,2, Daisuke Kobayashi², Tomoyuki Yamamoto¹, Kazuyuki Hirose^1,2 (1.Waseda univ., 2.ISAS/JAXA)