ChenYi Su

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 7:00 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-C302-1~19] 13.7 Compound and power electron devices and process technology

5:45 PM - 6:00 PM

▲ [18p-C302-15] Initial trap and hysteresis analysis of Atomic Layer Deposited Al₂O₃ on b-Ga₂O₃

〇(M1)ChenYi Su¹, Takuya Hoshii¹, Iriya Muneta¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹, Hiroshi Iwai¹, Kuniyuki Kakushima¹ (1.Tokyo Institute of Technology)