Takahiro Yamada

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 7:00 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-C302-1~19] 13.7 Compound and power electron devices and process technology

3:30 PM - 3:45 PM

[18p-C302-8] Control of Oxide Interlayer for Improving the Reliability of SiO₂/GaN MOS Devices

〇Takahiro Yamada¹, Daiki Terashima¹, Kenta Watanabe¹, Mikito Nozaki¹, Hisashi Yamada², Tokio Takahashi², Mitsuaki Shimizu², Akitaka Yoshigoe³, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ., 2.AIST, 3.JAEA)