Ryo Hirose

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 7:30 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[18p-D103-1~23] 15.7 Crystal characterization, impurities and crystal defects

1:15 PM - 1:30 PM

△ [18p-D103-1] Characteristics of Molecular Ion Implanted Epitaxial Wafers (1) - A study of CH₂P ion implanted silicon epitaxial wafers-

〇Ryo Hirose¹, Ryosuke Okuyama¹, Takeshi Kadono¹, Ayumi Masada¹, Satoshi Shigematsu¹, Kouji Kobayashi¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)