Satoshi Shigematsu

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:15 PM - 7:30 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[18p-D103-1~23] 15.7 Crystal characterization, impurities and crystal defects

2:15 PM - 2:30 PM

△ [18p-D103-5] Characteristic of Molecular Ion Implaned Epitaxial Wafers (5)
-Getering Behavior Analysis of Implantation-related Defects in CH₃O Ion Implanted Wafers Using Atom Probe Tomography-

〇Satoshi Shigematsu¹, Ryosuke Okuyama¹, Ryo Hirose¹, Takeshi Kadono¹, Koji Kobayashi¹, Ayumi Masada¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (1.SUMCO)