Masashi Senaha

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:45 PM - 5:15 PM E201 (57-201)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-E201-1~13] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

1:45 PM - 2:00 PM

[18p-E201-1] Stability of AlO_x Films by Substrate Cooling

〇Masashi Senaha¹, Akira Taki¹, Tatsunori Isobe¹, Makoto Arai¹, Junya Kiyota¹ (1.ULVAC, Inc.)