Takahide Umeda

→ Search for Takahide Umeda in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 18, 2018 4:00 PM - 6:00 PM P14 (P)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18p-P14-1~19] 15.6 Group IV Compound Semiconductors (SiC)

4:00 PM - 6:00 PM

[18p-P14-16] Nitrogen doping of 4H-SiC MOS interface after ¹⁵NO post-oxidation anneal characterized by electron-spin-resonance (ESR) spectroscopy

〇Takahide Umeda¹, Mitsuru Sometani², Shinsuke Harada² (1.Univ. of Tsukuba, 2.AIST)