Shinya Hirano

→ Search for Shinya Hirano in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 18, 2018 4:00 PM - 6:00 PM P14 (P)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[18p-P14-1~19] 15.6 Group IV Compound Semiconductors (SiC)

4:00 PM - 6:00 PM

[18p-P14-5] Evaluation of CMP surface quality for high reliabilities of SiC devices

〇Shinya Hirano^1,2, Keiichi Yamada^1,3, Akira Miyasaka^1,4, Susumu Tsukimoto^1,5, Keiko Masumoto¹, Junji Senzaki¹, Kenji Kawata¹, Tomohisa Kato¹, Hajime Okumura¹ (1.AIST, 2.FUJIMI INCORPORATED, 3.TORAY Research Center, Inc., 4.SHOWA DENKO K.K., 5.JFE Techno-Research Corporation)

▲