Yoshiharu Enta

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:30 PM - 3:30 PM P2 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.5 Surface Physics, Vacuum

[18p-P2-1~10] 6.5 Surface Physics, Vacuum

1:30 PM - 3:30 PM

[18p-P2-10] Silicon Fine Structure Formation at Interface between SiO₂ Layer and Si Substrate by Electron Beam Irradiation at Room Temperature

〇Yoshiharu Enta¹, Yusuke Masuda¹, Yosuke Chida¹ (1.Hirosaki Univ.)