Tomoki Oku

→ Search for Tomoki Oku in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:30 PM - 3:30 PM P7 (P)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[18p-P7-1~7] 13.3 Insulator technology

1:30 PM - 3:30 PM

[18p-P7-5] Penetration of water molecule into surface-oxidized layer of SiN_x films

〇Tomoki Oku¹, Masahiro Totuska¹, Shinichi Takagi¹ (1.Mitsubishi Electric)