Shinji Yamaguchi

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Speaker, Author, Co-Author

Sun. Mar 18, 2018 1:30 PM - 3:30 PM P7 (P)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[18p-P7-1~7] 13.3 Insulator technology

1:30 PM - 3:30 PM

[18p-P7-7] Paramagnetic point defects in silicon nitride films annealed at 1050℃

〇(M1)Shinji Yamaguchi¹, Osamu Kazumi¹, Kiyoteru Kobayashi¹ (1.Tokai Univ.)