Shinji Nakada

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-C101-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:00 AM - 11:15 AM

[19a-C101-8] SiC Nanodot Formation in Bulk-Si Substrate using Hot C⁺Ion Implantation (Ⅱ): Dependebcy of Ion Implantation Temperature

〇Shinji Nakada¹, Masaki Yamamoto¹, Sho Irie¹, Yusuke Omata¹, Takashi Aoki¹, Toshiyuki Sameshima², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)