Takeshi Kitajima

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:00 AM - 12:00 PM C201 (52-201)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[19a-C201-1~11] 8.3 Plasma nanotechnology

10:00 AM - 10:15 AM

[19a-C201-5] Low damage Radical Nitiridation of Silicon with Gold Nanoparticle catalyst on Surface

〇Takeshi Kitajima¹, Kodai Ishida¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)