Junko Maekawa

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:00 AM - 12:15 PM C302 (52-302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19a-C302-1~12] 13.7 Compound and power electron devices and process technology

11:30 AM - 11:45 AM

[19a-C302-10] Defect characterization of GaN substrate with hot implant process by TEM

〇Junko Maekawa¹, Hitoshi Kawanowa¹, Masahiko Aoki¹, Katsumi Takahiro², Toshiyuki Isshiki² (1.Ion Technology Center Co., Ltd, 2.Kyoto Institute of Technology)

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