Kazuaki Seki

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 9:00 AM - 12:15 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[19a-D103-1~12] 15.6 Group IV Compound Semiconductors (SiC)

11:00 AM - 11:15 AM

[19a-D103-8] Evaluation of dislocation propagation behavior in epitaxial growth process on “4H-SiC wafer grown by solution method” using synchrotron X-ray topography

〇Kazuaki Seki¹, Kazuhiko Kusunoki¹, Shunta Harada², Toru Ujihara² (1.Nippon Steel & Sumitomo Metal Corp., 2.Nagoya Univ.)