Daisuke Ohori

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[19p-C204-1~17] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:00 PM - 2:15 PM

[19p-C204-2] High Aspect Ratio Silicon Nanopillar Structure Fabricated by Neutral Beam Etching and Bio-template

〇Daisuke Ohori¹, Kazuhiko Endo^1,3, Seiji Samukawa^1,2 (1.IFS, Tohoku Univ., 2.AIMR, Tohoku Univ., 3.AIST)