Takayoshi Tsutsumi

→ Search for Takayoshi Tsutsumi in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:45 PM - 6:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[19p-C204-1~17] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:00 PM - 3:15 PM

[19p-C204-6] Change in surface morphology of fluorinated Si surface by Ar ion irradiation

Atsuki Asano¹, 〇Takayoshi Tsutsumi¹, Hiroki Kondo¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ.)