Seiji Samukawa

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 5:10 PM G203 (63-203)

Symposium (Oral)
| Symposium
| Is Ge substituting for Si?

[19p-G203-1~7] Is Ge substituting for Si?

4:10 PM - 4:40 PM

▲ [19p-G203-6] Atomic Layer Defect-free Ge Fin Fabrication by Neutral Beam Processes

〇Seiji Samukawa^1,2 (1.AIMR, Tohoku Univ., 2.IFS, Tohoku Univ.)