Yoji Yasuda

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P5 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[19p-P5-1~39] 6.3 Oxide electronics

1:30 PM - 3:30 PM

[19p-P5-1] High-rate sputter deposition of WO₃ films by using a Facing Target type sputtering system

〇Yoji Yasuda¹, Yoichi Hoshi¹ (1.Tokyo Polytechnic Univ.)