Kazuya Kadota

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 10:30 AM - 12:00 PM B401 (53-401)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-B401-1~6] 7.3 Micro/Nano patterning and fabrication

10:45 AM - 11:00 AM

[20a-B401-2] Evolutional OPC as DTCO : OPC Shot Counts Optimization on SPT Mask Technology

〇Kazuya Kadota¹ (1.Nanoscience Lab.)