Yutaka Yoshida

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 10:30 AM - 12:00 PM B401 (53-401)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-B401-1~6] 7.3 Micro/Nano patterning and fabrication

11:45 AM - 12:00 PM

[20a-B401-6] Composite Nano-Structure on Si Surface using Nanosecond Pulsed Laser Irradiation

〇Yutaka Yoshida¹, Ko Onishi², Yasutaka Matsuo², Seiichi Watanabe³ (1.Kitami Inst. Tech., 2.Hokkaido Univ. RIES, 3.Hokkaido Univ. CAREM)