Toshihiro Mitani

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:00 AM - 10:15 AM

[20a-C204-5] The formation of super water-repellent tree-formed a-C:F by the electronic excitation of the c-C₄F₈ condensation gas

〇(B)Toshihiro Mitani¹, Yoshinobu Uegaki², Tetsuya Sato¹ (1.Univ. Yamanashi, 2.Yamanashi Indust. Tech. Center)