Tomoyuki Tanaka

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-C204-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:15 AM - 10:30 AM

[20a-C204-6] High-rate synthesis of fluorocarbon film using a concentrated CF₄ gas by sub-atmospheric pressure plasma and evaluation of the film property

〇Tomoyuki Tanaka¹, Kikura Jou¹, Takemoto Hiroki¹, Kakiuchi Hiroaki¹, Yasutake Kiyoshi¹, Ohmi Hiromasa¹ (1.Osaka Univ)