10:15 AM - 10:30 AM
[20a-C204-6] High-rate synthesis of fluorocarbon film using a concentrated CF4 gas by sub-atmospheric pressure plasma and evaluation of the film property
Keywords:plasma CVD, fluorocarbon film
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Tue. Mar 20, 2018 9:00 AM - 12:15 PM C204 (52-204)
Masanori Shinohara(Natl. Inst. of Tech.,Sasebo Col.)
10:15 AM - 10:30 AM
Keywords:plasma CVD, fluorocarbon film