Teruaki Kumazawa

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 9:00 AM - 12:00 PM D103 (56-103)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20a-D103-1~11] 15.6 Group IV Compound Semiconductors (SiC)

11:15 AM - 11:30 AM

△ [20a-D103-9] Consideration of gate insulator on 4H-SiC Si face using a SiNx layer by ALD

〇Teruaki Kumazawa¹, Mituo Okamoto¹, Miwako Iijima¹, Yohei Iwahashi², Shinzi Fujikake¹, Tsuyoshi Araoka³, Tae Tawara¹, Hiroshi Kimura³, Shinsuke Harada¹, Hajime Okumura¹ (1.AIST, 2.Toyota Motor Co., 3.Fuji Electric Co.,Ltd.)

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