Kenta Watanabe

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:00 PM - 4:15 PM B401 (53-401)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20p-B401-1~12] 7.3 Micro/Nano patterning and fabrication

3:45 PM - 4:00 PM

[20p-B401-11] Study on profile correction for resist shrinkage in nanoimprint lithography

Tatsuya Iida¹, 〇Kenta Watanabe¹, Masaaki Yasuda¹, Hiroaki Kawata¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)