Noriko Miura

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:45 PM - 4:45 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20p-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

2:15 PM - 2:30 PM

[20p-C101-3] Thin Gate Oxidation Process Using a Minimal Focused Light Heating Furnace

〇Noriko Miura^1,3, Norio Umeyama^1,2, Takeshi Yamada^1,3, Takeshi Aizawa^1,3, Shinihi Ikeda^1,2, Yuuki Ishida^1,2, Takanori Mikahara^1,2, Yasuhiro Onishi^1,3, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.YONEKURA)

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