1:45 PM - 2:00 PM
〇Norio Umeyama1,2, Noriko Miura2, Kazushige Sato2, Miyako Hada3, Hiroshi Nishizato3, Takumi Moriyama4, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.HORIBA STEC, 4.HORIBA)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Tue. Mar 20, 2018 1:45 PM - 4:45 PM C101 (52-101)
Reo Kometani(Univ. of Tokyo)
△:奨励賞エントリー
▲:英語発表
▼:奨励賞エントリーかつ英語発表
空欄:どちらもなし
1:45 PM - 2:00 PM
〇Norio Umeyama1,2, Noriko Miura2, Kazushige Sato2, Miyako Hada3, Hiroshi Nishizato3, Takumi Moriyama4, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.HORIBA STEC, 4.HORIBA)
2:00 PM - 2:15 PM
Mitsuko Muroi1, Miya Matsuo1, 〇Hitoshi Habuka1, Takanori Mikahara2,3, Shin-ichi Ikeda2,3, Yuuki Ishida2,3, Shiro Hara2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)
2:15 PM - 2:30 PM
〇Noriko Miura1,3, Norio Umeyama1,2, Takeshi Yamada1,3, Takeshi Aizawa1,3, Shinihi Ikeda1,2, Yuuki Ishida1,2, Takanori Mikahara1,2, Yasuhiro Onishi1,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.YONEKURA)
2:30 PM - 2:45 PM
〇Shuichi Noda1, Hiroyuki Tanaka1,2, Kazumasa Nemoto1, Kazuhiro Koga2, Yuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-Kogho)
2:45 PM - 3:00 PM
〇Yuuki Ishida1,2, Takanori Mikahara1, Noriko Miura2, Shinichi Ikeda1,2, Takahiro Ito3, Hitoshi Habuka4, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.ORIENTAL MOTOR, 4.Yokohama National Univ.)
3:00 PM - 3:15 PM
〇kazushige sato1,3, Takashi Chiba1,3, Masao Terada1,3, Shinichi Ikeda1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.Minimal Fab General Incorporated Association, 2.AIST, 3.Sakaguchi E.H VOC Corp.)
3:30 PM - 3:45 PM
〇Masashi Kase1, Hiroyuki Tanaka1,2, Yoshiyuki Nozawa3, Toshiyasu Hayami3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPP Technologies)
3:45 PM - 4:00 PM
〇Hiroyuki Tanaka1,2, Hisato Ogiso1,2, Shizuka Nakano1,2, Yoshiyuki Nozawa2,3, Toshihiro Hayami2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.SPPT)
4:00 PM - 4:15 PM
〇Fumito Imura1,2, Tomoaki Kageyama1,3, Michihiro Inoue1, Arami Saruwatari1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Tottori Univ.)
4:15 PM - 4:30 PM
〇Toru Mannami1, Hiroko Kaneko1, Nobuyoshi Yamauchi1, Masanori Iwata1, Kenji Miyake1, Takafumi Yoshinaga2, Sommawan Khumpuang3, Shiro Hara3 (1.PMT, 2.KUMAMOTO BOSEI, 3.AIST)
4:30 PM - 4:45 PM
〇Takashi Yajima1,2, Masaharu Yasui1,2, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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