Yuuki Ishida

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:45 PM - 4:45 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20p-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

2:45 PM - 3:00 PM

[20p-C101-5] Characterization of the minimal CVD tool in the hydrodynamic point of view

〇Yuuki Ishida^1,2, Takanori Mikahara¹, Noriko Miura², Shinichi Ikeda^1,2, Takahiro Ito³, Hitoshi Habuka⁴, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.ORIENTAL MOTOR, 4.Yokohama National Univ.)

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