The 65h JSAP Spring Meeting, 2018

Reo Kometani

Chairperson, etc.

Tue. Mar 20, 2018 1:45 PM - 4:45 PM C101 (52-101)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Reo Kometani(Univ. of Tokyo)