kazushige sato

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Speaker, Author, Co-Author

Tue. Mar 20, 2018 1:45 PM - 4:45 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20p-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

3:00 PM - 3:15 PM

[20p-C101-6] Heating characteristics of SOI substrate in minimal laser heating furnace

〇kazushige sato^1,3, Takashi Chiba^1,3, Masao Terada^1,3, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab General Incorporated Association, 2.AIST, 3.Sakaguchi E.H VOC Corp.)

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