Masato Sone

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Chairperson, etc.

Mon. Mar 19, 2018 1:45 PM - 7:05 PM C101 (52-101)

Symposium (Oral)
| Symposium
| Integrated Sensor Systems for Ubiquitous Health Care Applications

[19p-C101-1~12] Integrated Sensor Systems for Ubiquitous Health Care Applications

Masato Koyama(TOSHIBA), Ken Uchida(Keio Univ.), Masato Sone(Titech)

Tue. Mar 20, 2018 9:15 AM - 12:15 PM C101 (52-101)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[20a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Masato Sone(Titech)