9:45 AM - 10:00 AM
[17a-C101-2] Real-time Observation of Crystalline Growth Using Atmospheric Pressure Thermal-Plasma-Jet and Cylindrical Rotation Stage Combined with High-speed Camera
Keywords:Atmospheric Pressure Thermal-Plasma-Jet
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[17a-C101-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Sat. Mar 17, 2018 9:30 AM - 12:30 PM C101 (52-101)
Takashi Noguchi(Univ. of the Ryukyus)