The 65h JSAP Spring Meeting, 2018

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[17a-F206-1~13] 13.3 Insulator technology

Sat. Mar 17, 2018 9:00 AM - 12:30 PM F206 (61-206)

Masao Inoue(Renesas), Takanobu Watanabe(Waseda Univ.)

9:45 AM - 10:00 AM

[17a-F206-4] Electronic States of Thermally-grown SiO2/Si Structure Measured by Total Photoelectron Yield Spectroscopy

〇Akio Ohta1, Takuya Imagawa1, Mitsuhisa Ikeda1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:Total Photoelectron Yield Spectroscopy, Photoemission Spectroscopy, Electronic States