[17p-C101-1~6] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-C101-2] Capping Effect of Crystallized InSb film on Glass

〇(D)Charith Jayanada Koswaththage¹, Tatsuyuki Higashizako¹, Tatsuya Okada¹, Takashi Noguchi¹, Hirosato Tanaka², Mamoru Furuta² (1.Univ. of the Ryukyus, 2.Kochi Uni. of Tech.)

Keywords:InSb, Hall Device, BLDA