[17p-C204-1~20] 8.1 Plasma production and diagnostics

[17p-C204-6] Pulse-power and discharge-mode dependences for plasma emissions generated by high-power pulsed magnetron sputtering (HPPMS)

〇(B)Hiroshi Nishida¹, Koichi Matsuda¹, Tomonori Syoji¹, Bizi Ichikawa¹, Takumi Oshiro¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Motoyoshi Nakano³, Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

Keywords:magnetron sputtering, plasma diagnostics, optical measurement

Emission spectra of plasma generated direct current magnetron sputtering (dcMS) and high-power pulsed magnetron sputtering (HPPMS) were measured in the range of 0.3 to 0.7 kW with the interval of 0.1 kW by using of the HPPMS apparatus for hard-coating processing.
For the same discharge power, the difference emission spectra between HPPMS and dcMS
show the dominant wavelength region for luminescent species: Ti⁺ ion and Ti atom. The results are discussed in relation to the electronic structures of the luminescent species.