The 65h JSAP Spring Meeting, 2018

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[17p-F206-1~17] 13.3 Insulator technology

Sat. Mar 17, 2018 1:45 PM - 6:15 PM F206 (61-206)

Tomo Ueno(TUAT), Akio Ohta(Nagoya Univ.)

2:00 PM - 2:15 PM

▼ [17p-F206-2] Kinetic Model for Thermal Oxidation of Germanium

〇Wang Xu1, Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.Tokyo Univ.)

Keywords:Germanium, Thermal Oxidation