[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-14] MEMS Fabry-Perot interferometric surface stress sensor array for multi biomarker detection

〇(PC)Satoshi Maruyama¹, Takeshi Hizawa¹, Yoshitaka Arimi¹, Yasuyuki Kimura¹, Kazuhiro Takahashi^1,2, Kazuaki Sawada¹ (1.Toyohashi Tech., 2.JST PRESTO)

Keywords:Fabry-Perot interferometer, Micro-electro-mechanical-systems (MEMS)

We developed a Fabry–Perot interferometer sensor array (32 x 32) for biomarker detection. A parylene-C film is on the photodiode which is the sensor, the transmittance change is caused by the distortion of the movable film by molecular adsorption, the change is obtained as the voltage output value. Sensors can be arrayed by using the image sensor technology. Therefore, paying attention to the characteristics of the surface stress sensor which senses surface stress change due to molecular adsorption in liquid in real time, our purpose is to produce an optical detection type biosensor array capable of multi detection.