[17p-P7-1~21] 13.4 Si系プロセス・Si系薄膜・配線・MEMS・集積化技術

▼ [17p-P7-4] Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometers

〇Ken Hashigata¹、Haochun Tang¹、Chun-Yi Chen¹、Tso-Fu Mark Chang¹、Daisuke Yamane¹、Katsuyuki Machida^1,2、Kazuya Masu¹、Masato Sone¹ (1.Tokyo Tech、2.NTT AT Corp.)

キーワード：micro-cantilever, Ti-Au, Bi-layer