The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

[18p-C201-1~7] Ion Beam and Surface Analysis: Recent Progress in Secondary Ion Mass Spectrometry (SIMS) and Its Application to Organic Analysis

Sun. Mar 18, 2018 1:45 PM - 5:30 PM C201 (52-201)

Ken Nakamura(AIST), Yasuhito Gotoh(Kyoto Univ.)

5:00 PM - 5:30 PM

[18p-C201-7] The Trend of the International Standardization of Secondary Ion Mass Spectrometry

〇Akio Takano1 (1.Toyama Co., Ltd.)

Keywords:SIMS, ISO, standard

ISO TC 201 SC 6 develops international standards on SIMS and is now developing four standards. I am to introduce ISO/FDIS 20411, “Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry”, and three other standards under developing.