4:10 PM - 4:25 PM
[18p-C304-9] Enhancement of hole mobility in Ge(Si) thin films on an insulator by large-grain solid-phase crystallization
Keywords:germanium, solid phase crystallization
Symposium (Oral)
Symposium » Ge Technology - Electron / Photon / Phonon / Spin - Innovation of Group-IV Semiconductors -
Sun. Mar 18, 2018 1:00 PM - 5:25 PM C304 (52-304)
Kentarou Sawano(Tokyo City Univ.), Katsunori Makihara(Nagoya Univ.)
4:10 PM - 4:25 PM
Keywords:germanium, solid phase crystallization