[18p-P7-1~7] 13.3 Insulator technology

[18p-P7-6] Influence of film composition on conduction current in silicon nitride films after exposure to ultraviolet illumination

〇(M1)Hiroyasu Kobayashi¹, Shinji Yamaguchi¹, Kiyoteru Kobayashi¹ (1.Toukai Univ.)

Keywords:silicon nitride film