[19a-D103-1~12] 15.6 Group IV Compound Semiconductors (SiC)

[19a-D103-4] Stabilization of step flow over the entire crystal by solution flow switching during growth for SiC solution growth

〇(M1)Tomoki Endo¹, Can Zhu¹, Kenta Murayama¹, Shunta Harada¹, Miho Tagawa¹, Toru Ujihara^1,2 (1.Nagoya Univ., 2.AIST)

Keywords:SiC, solution growth