[19p-P4-1~15] 6.2 Carbon-based thin films

[19p-P4-4] Fabrication and structural analysis of high-nitrogen containing a-CNx:H thin films using radio-frequency plasma CVD of the organic compound-N₂-Ar gas mixtures

〇Yoshiki Iizawa¹, Hidetoshi Saitoh¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech)

Keywords:carbon nitride