The 65h JSAP Spring Meeting, 2018

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[19p-P6-1~17] 6.4 Thin films and New materials

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

1:30 PM - 3:30 PM

[19p-P6-15] Dry etching of strain gauge thin films for oil less pressure sensor using Neutral Loop Discharge Plasma

Kazuo Satoh1, Yoshiharu Kakehi1, Yusuke Kanaoka1, Taizo Oguri1, Yusuke Kondo1, Yoshiharu Yamada1 (1.ORIST)

Keywords:pressure sensor, dry etching, strain gauge