Kazuo Satoh

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Speaker, Author, Co-Author

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P6 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[19p-P6-1~17] 6.4 Thin films and New materials

1:30 PM - 3:30 PM

[19p-P6-15] Dry etching of strain gauge thin films for oil less pressure sensor using Neutral Loop Discharge Plasma

〇Kazuo Satoh¹, Yoshiharu Kakehi¹, Yusuke Kanaoka¹, Taizo Oguri¹, Yusuke Kondo¹, Yoshiharu Yamada¹ (1.ORIST)