[19p-P6-1~17] 6.4 Thin films and New materials

[19p-P6-15] Dry etching of strain gauge thin films for oil less pressure sensor using Neutral Loop Discharge Plasma

〇Kazuo Satoh¹, Yoshiharu Kakehi¹, Yusuke Kanaoka¹, Taizo Oguri¹, Yusuke Kondo¹, Yoshiharu Yamada¹ (1.ORIST)

Keywords:pressure sensor, dry etching, strain gauge