[19p-P6-1~17] 6.4 Thin films and New materials

[19p-P6-16] Optical properties of non-polar ZnO films grown by catalytic reaction-assisted chemical vapor deposition

〇(M1)Taro Saito¹, Munenori Ikeda¹, Ariyuki Kato¹, Koichiro Oishi², Hironori Katagiri², Kanji Yasui¹ (1.Nagaoka Univ. Technol., 2.Nat. Inst. Technol., Nagaoka Coll.)

Keywords:catalytic reaction, nonpolar ZnO, polarization property

Non-polar ZnO films were grown on r-plane sapphire substrates through a reaction between dimethylzinc and high-temperature H₂O produced by a Pt-catalyzed H₂ and O₂ reaction. The ZnO films were found to have an anisotropic surface morphology with stripe arrays. Since the ZnO films exhibited linearly polarized emission, angular dependences of the laser light for excitation and the emission light on the crystalline axis of the ZnO films were evaluated. The band-edge luminescence at 3.3 eV was a maximum when the electric field vector E was parallel to the [1-100] direction and a minimum when E was parallel to the c-axis. The polarization emission characteristic may be derived from the crystal domain structure.