The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[20a-B401-1~6] 7.3 Micro/Nano patterning and fabrication

Tue. Mar 20, 2018 10:30 AM - 12:00 PM B401 (53-401)

Jiro Yamamoto(HITACHI)

11:45 AM - 12:00 PM

[20a-B401-6] Composite Nano-Structure on Si Surface using Nanosecond Pulsed Laser Irradiation

〇Yutaka Yoshida1, Ko Onishi2, Yasutaka Matsuo2, Seiichi Watanabe3 (1.Kitami Inst. Tech., 2.Hokkaido Univ. RIES, 3.Hokkaido Univ. CAREM)

Keywords:Nanosecond Pulsed Laser, Electron Beam Lithography